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EE Research & Development
MEMS Research Group

Introduction


MicroElectroMechanical Systems are micro devices built with tools and techniques derived from the microelectronics industry. Unlike conventional integrated circuits, MEMS can have many functions, including sensing, communication, and actuation. Just like microelectronics, MEMS increasingly permeate our everyday lives, for example in cellular phones, digital movie projectors, automotive sensors, navigation and guidance, lab-on-chip systems.  Current MEMS design practices focus on physical devices and process development.


About us


GIKI MEMS Research group started in fall 2006 by Dr. Shafaat Ahmed Bazaz. He brought funding from Higher Education Commission (HEC) Pakistan and National ICT Fund for development of MEMS lab and MEMS chip testing facility. MEMS design and test lab has been established in GIK institute and test lab is under up gradation process.

The main focus of our group is on MEMS sensors and actuators along with microelectronics and interface circuitry. The ultimate goal of our research is to improve previous work and provide novel designs for applications in different field i.e. biomedical, automobile etc. The main streams of our research is designing and testing. Many novel device designs have been fabricated and tested such as gyroscope, accelerometer, microgripper. CAD tools are used extensively for design and verification of proposed device for cost effective development cycle. We are using advance licensed software such as CoventorWare, MEMSPro Tools, MATLAB, Labview etc. Further research includes Electrical equivalent (lumped) and analytical modeling of MEMS devices.


PakMEMS Group Website: http://www.giki.edu.pk/pakmems

Research Topics

  • Development of micro accelerometer for Automobile applications
  • Force Sensors to be integrated with Microgrippers and microcontroller for biomedical application
  • Electrical equivalent (lumped) modeling of mechanical part of MEMS systems
  • Design of Pre-amplifier chip using CMOS 0.35 technology from Austria Microsystem Inc. for neural recording of MEMS based Brain Implantable electrodes


Members


Faculty

  • Dr. Shafaat A. Bazaz, HEC Foreign Professor.
  • Muhammad Sohail, Research Associate.
  • Muhammad Bilal Saif, Research Associate.
  • Muhammad Mubasher Saleem, Research Associate.
  • Kashif Riaz, Research Associate.


Graduate Students

  • Dr. Rana Iqtadar Shakoor (PhD Completed)

  • M. Shuja Khan (MS Completed)

  • Abid Iqbal (MS Completed)

  • Fahimullah Khan (MS Completed)

  • H. M. Usman Sani (MS Completed)

  • Ahmad Naeem (MS Completed)

  • Kinnan Amjad (MS Completed)

  • Muhammad Yasin (MS Completed)

  • Sharif Khan (MS Completed)

  • Muhammad Umer Mian (MS Completed)

  • Khurrum Javed (MS Completed)

  • Yasir Abbas (MS Candidate)

  • Nayyer Abbas (MS Candidate)



Collaborations

  •  Professor Yongjun Lai

QueensUniversity, Mechanical Engineering Department Kingston, Ontario, Canada, K7L 3N6. Professor’s Name, Affiliation

  • Professor Dean Aslam,  

Director, Micro and Nano Technology Laboratory (MANTL), Electrical and Computer Engineering Department, Michigan State University.

  • Professor Michael Kraft, School of Electronics and Computer Science University of Southampton.
  • Dr. Muhammad Masood ul Hassan,   Department of Chemical & Materials Engineering, PIEAS.


Research Publications


Journal Publications

  • Shafaat A. Bazaz,Abid Iqbal, Muhammad S. Khan "Monolithic Tri-axes Nickel based Accelerometer design verified through Finite Element Analysis", Arabian Journal for Science and Engineering , 2011, (Impact Factor: 0.224).

  • Kashif Riaz, Shafaat Bazaz, Mubashir Saleem, Rana Iqtidar Shakoor "Design damping estimation and experimental characterization of decoupled 3DOF robust MEMS gyroscope", Sensors & Actuator: A. Physical, doi:10.1016/j.sna.2011.09.032, 2011 (Impact Factor: 1.74).

  • Shafaat A. Bazaz, Mubahser Saleem, " Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances", Journal of Microsystem Technologies, MITE1507R1, 2011 (Impact Factor:1.29).

  • Abid Iqbal, Shafaat A. Bazaz, " Behavioral Modeling of monolithically integrate Capacitive Accelerometer based on MetalMUMPs", Journal of Simulation: International Transactions of the Society for Modelling and Simulation, ID # T-10-0124.R2, Accepted (Impact Factor 0.448).

  • Shafaat A. Bazaz, Fahimullah Khan , R. I. Shakoor, " Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor", Sensors & Actuators: A. Physical (Elsevier), 167, 2011, 44-53, ISSN 0924-4247 (Impact Factor: 1.74).

  • R. I. Shakoor, P. Srinivasan, Shafaat A. Bazaz, Performance of a compliant structure for resonant microgyroscope, IEEE Sensors Journal, doi: 10.1109/JSEN.2010.2094185, 2010 (Impact Factor 1.58).

  • Rana I. Shakoor, S.A. Bazaz, Mubasher Saleem, M.M. Hasan "Mechanically Amplified 3-DoF Non-Resonant MEMS gyroscope Fabricated in Low Cost MetalMUMPs Process" revision under review ASME Journal of Mechanical Design (2010).

  • Shakoor, R. I., Bazaz, S., Burnie, M., Lai, Y. and Hassan, M., Electrothermally Actuated Resonant Rate Gyroscope Fabricated using the MetalMUMPs, Microelectronics Journal (Elsevier), 42, 2011, 585-593, ISSN 0026-2692.(Impact Factor:0.778).

  • Fahimullah Khan , S.A Bazaz, Muhammad Sohail " Design and implementation of Electrostatic SOI-MUMPs microgripper" Journal of Microsystem Technologies, DOI 10.1007/s00542-010-1129-2, ISSN 0946-7076, Volume 16, Number 11, August 2010.(Impact Factor:1.29).

  • H. M. Usman Sani, Shafaat A. Bazaz, and Nisar Ahmed "Fabless Prototyping Methodology for the Development of SOI based MEMS Microgripper", Journal of Engineering & Technology, World Academy of Science, Issue 64, 2010, pp. 492-496 (EBSCO, INTUTE, Engineering Index (EI)).

  • R.I.Shakoor, Shafaat A. Bazaz, Michael Kraft, Yongjun Lai, M. Masood ul Hassan," Thermal Actuation based 3-DoF non Resonant Microgyroscope using MetalMUMPS," journal of Sensors 2009, 9(4), 2389-2414; 1 April 2009 (Impact Factor 1.87).

  • S.A. Bazaz, B. Tondu, " Minimum Time On-Line Trajectory Generation based on Low order Spline Methods for Industrial Manipulators" Journal of Robotics and Autonomous Systems, no 29 (4), 1999, pp. 257-268 (Impact factor 1.36).

  • Tondu, S.A. Bazaz, " The 3-Cubic Method: An Optimal On -Line Robot Joint Trajectory Generation under Acceleration, Velocity and Wandering Constraints. " The Int. Journal of Robotics Research, 1999, 18 (9), p. 893-901 (Impact factor 1.99).


Conference Publications

  • Ahmad Naeem, Shafaat A. Bazaz, Dean M. Aslam, "A Low-Power and Low-Noise Neural Amplifier for All-Diamond Neural Probes" 6th IEEE International Conference on Emerging Technologies, Islamabad, Pakistan, October 18-19, 2010.

  • M. Shuja Khan, Abid Iqbal, Shafaat A. Bazaz and Muhammad Abid, "A Monolithic Three-Axis PolyMUMPs Based MEMS Capacitive Sensing Accelerometer", SPIE International Conference on NanoScience Engineering, 1-5 August 2010, San Diego Convention Center, San Diego, California, USA.

  • M. Shuja Khan, Shafaat A. Bazaz and Muhammad Abid, "Comparative Study on System Model and Finite Element Analysis of a Monolithic 3DOF MEMS Capacitive Accelerometer", International Conference on Information and Multimedia Technology, ISBN: 978-0-7695-3922-5, December 18-19, 2009 Jeju Island, South Korea.

  • ]Rana I. Shakoor, Shafaat A. Bazaz, M. M. Hasan, "Design Modeling and Simulation of Electrothermally Actuated Microgyroscope Fabricated using the MetalMUMPs", International Workshop on Thermal investigations of ICs and Systems (THERMINIC), 7-9 October 2009, Leuven, Belgium.

  • Marc Burnie, Yongjun Lai, R. Iqtidar Shakoor and Shafaat A. Bazaz, "Design and Simulation of Thermally Driven Microgyroscopes", 2nd Micro and Nanoelectronics Research Conference 13-14 October 2009, Ottawa, Canada.

  • Bilal Saif, Shafaat A Bazaz, Nisar Ahmed, "Interface Electronics and Control of Electrostatically Actuated MEMS Microgripper", 13th IEEE International Multitopic Conference 2009 (INMIC-2009), December 14-15, 2009 Islamabad.

  • Rana I. Shakoor, Shafaat A. Bazaz, M. M. Hasan, "Design of Thermal Dual-Mass MEMS Gyroscope with 2-DoF Drive Model Oscillator", 2008 IEEE International Conference on Semiconductor Electronics, 25-27 November 2008, Johor Bahru, Malaysia.

  • Najamuddin, Shafaat A. Bazaz, H.Y. Chan, Dean M. Aslam, "Impedance Characterization of MEMS based All Diamond Neural Probe", 20th International Conference on Microelectronics, 14-17 December 2008, Sharjah.

  • Kinnan Amjad, Shafaat A. Bazaz, Youngjun Lai, "Design of an Electrostatic MEMS Microgripper Systems Integrated with Force Sensor", 20th International Conference on Microelectronics, 14-17 December 2008, Sharjah.

  • Rana I. Shakoor, Shafaat A. Bazaz, Y. Lai, M. M. Hasan. "3-DoF Dual-Mass Nickel MEMS Gyroscope utilizing Chevron Based Thermal Actuation", SPIE, 1st International Conference of the Chinese society of Micro/Nano Technology, Beijing, China.

  • Rana I. Shakoor, Shafaat A. Bazaz, M. M. Hasan, "Comparative Study on Finite Element Analysis & System Model Extraction for Non-Resonant 3-DoF Microgyroscope" IEEE International Behavioral Modeling and Simulation conference BMAS 2008, San Jose, CA, USA.

  • S.A. Bazaz, B. Tondu, "3-Cubic Spline for On-Line Cartesian Space Trajectory Planning of Industrial Manipulators." 5th IEEE Int. Workshop on Advanced Motion Control, July 1998, Coimbre, Portugal, pp. 493-8.Paper 2

  • S.A. Bazaz, B. Tondu, "An optimal on- line robot trajectory generation in Cartesian space." Int. Conf. on Architectures, Networks and Intelligent Systems for manufacturing Integration, SPIE's Intelligent & Automated Manufacturing Society, Oct. 1997, Pittsburgh, USA, pp. 2-10.

  • Tondu, S.A. Bazaz, "The 3-Cubic Method: An On- Line Robot Joint Trajectory Generator under Acceleration, Velocity and Wandering constraints." 4th Int. Symp. on Methods and Models in Automation and Robotics, August 1997, Miedzyzdroje, Poland, pp. 1195-1200

  • S.A. Bazaz, B. Tondu, "On-Line computing of a robotic manipulator Joint trajectory with Velocity and Acceleration Constraints. " 1997 IEEE Int. Symp. on Assembly and Task planning, August 1997, Los Angles, USA, pp. 1-6.

  • Dan Gale, Shafaat A. Bazaz, "Canadian Research, Technology, and Product Interests in Micromachining: An Update", Proceedings 8th World Micromachine Summit Maastricht, The Netherlands, April 30- May 2, 2002.

  • Brian Barge, Shafaat A. Bazaz, Dan Gale "MEMS Research, Technology and Product Development in Canada", The 8th International Conference on the Commercialization of Micro and Nano Systems, September 8-11, 2003, Amsterdam, The Netherlands

  • Jalal, S. Bazaz, M. Hefnawi, D. Choi, "Modeling of MEMS Varactors as phase shifters for multi-energy domain modeling in VHDL- AMS", 3rd Canadian Workshop on MEMS, Ottawa, Canada, August 2003.

  • R.I. Shakoor, I.R. Chughtai, S.A. Bazaz, M.J. Hyder, Masood-ul-Hassan, "Numerical Simulations of MEMS Comb-Drive Using Coupled Mechanical and Electrostatic Analyses", International Conference on Microelectronics, 13-15 December, 2005, Islamabad, Pakistan.

  • Yongjun Lai, Shafaat Bazaz, "Engineering curriculum development in microsystems" 3 rd CDEN (Canadian Design Engineering Network) International Design Conference, 24-26 July, 2006, Toronto, Canada.

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